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  3. metrology system: surface measurements.

metrology system: surface measurements.

For surface measurements in sub-mm and sub-µm range for complex shape inspection tasks in the industrial environment and medical domain, Demcon focal realized different interferometry layouts such as Michelson, Mach-Zehnder and Linnik. This technology can be used for height profile of MEMS chip structures, fiber facet quality inspection and full field OCT measurements.

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