Demcon focal
  • Markets
  • Products
    • Laser Projection Subunit (LPS)
    • Fine Steering Mirror (FSM)
    • Fast wavefront sensor
  • Technology
    • manufacturing & assembly
    • Expertises
  • How we work
  • Showcases
  • About us
  • Contact
  • career
  • news
  • de
  • en
focal-showcase-lithography lens design
  1. Home›
  2. Showcases›
  3. lithography lens design.

lithography lens design.

Demcon focal has the capabilities to design, deliver and qualify one of the most demanding precision optical assemblies: the lithography lens. Demcon uses state-of-the-art alignment tooling (Opticentric) and cleanroom facilities to achieve diffraction limited imaging for a large field of view. We designed a lithography lens with high NA and large field of view that is capable of imaging semiconductor structures on wafers to produce processors, LEDs, MEMS, USB memory, etc.

project specifics

  • Magnification 5x (0.2x)
  • Telecentric on image side
  • FOV 22mm x 22 mm
  • Diffraction limited
    • CD < 0.4um (NA> 0.5)
    • High CD uniformity (<2%)
  • Useable DOF ~ 1 um
  • Distortion < 100nm (maximum over field)

 

  • Magnification needs to be adjustable using back-focus
  • Order of magnitude 10 ppm
  • Minimize magnification and focus errors due to short term temperature fluctuations within +/-0.1 degree
  • Magnification change and focus due to pressure change is compensated using focus and back-focus only

"it is all about precision opto-mechanics."

Within Demcon focal we are very proud that we managed to design and realize this masterpiece.

contact-albert-borreman

Albert Borreman

+31 (0)88 115 20 00
contact us
Demcon focal
MarketsProductsTechnologyHow we workShowcasesAbout usNewsCareer

contact us

Demcon focal
+31 88 115 20 00

send a message
Demcon focal is part of the Demcon group
cookie policyprivacy statement
© 2025 Demcon. All rights reserved.