Laser annealing is growing rapidly in the semicon market. The elementary module for the laser annealing process is a laser beam delivery system that conditions the laser beam such that a uniform annealing is achieved over the surface. Demcon focal developed a laser annealing module in cooperation with a partnering system integrator.
Our contribution:
● The development of a custom-made F-theta lens with a long working distance
● Reduction of angular displacement errors due to manufacturing tolerances
● Tooling design and development for optical alignment and qualification
