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demcon-focal-case-f-theta lens design
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f-theta lens design.

Laser annealing is growing rapidly in the semicon market. The elementary module for the laser annealing process is a laser beam delivery system that conditions the laser beam such that a uniform annealing is achieved over the surface. Demcon focal developed a laser annealing module in cooperation with a partnering system integrator.

Our contribution:
● The development of a custom-made F-theta lens with a long working distance
● Reduction of angular displacement errors due to manufacturing tolerances
● Tooling design and development for optical alignment and qualification

Project specifics

  • Focal length of 280mm
  • Scan range of 7mm with ± 4 degree (Gaussian) input beams
  • 500W laser with wavelength of 500 nm
  • F-theta distortion less then 0.01%
  • Useable DOF ~ 1 um
  • Distortion < 100nm (maximum over field)
  • Magnification needs to be adjustable using back-focus - Order of magnitude 10 ppm
  • Minimize magnification and focus errors due to short term temperature fluctuations within +/-0.1 degree
  • Magnification chang and focus due to pressure change is compensated using focus and back-focus only
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